Electrolyte-Insulator-Semiconductor (EIS) with Gd2O3-based Sensing Membrane for pH-Sensing Applications

Electrolyte-Insulator-Semiconductor (EIS) with Gd2O3-based Sensing Membrane for pH-Sensing Applications

Jiun-Jr Wang Shang-Ren Lin Chuan-Haur Kao Ching-Hao Hu Hsiang Chen

School of Medicine, Fu Jen Catholic University, No. 510 Zhongzheng Rd , Xinzhuang Dist., New Taipei City, Taiwan (R.O.C) 24205

Department of Applied Material and Optoelectronic Engineering, National Chi Nan University, 54561, Puli, Taiwan, R.O.C.

Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan, TaoYuan Taiwan (R.O.C) 33351

Corresponding Author Email: 
hchen@ncnu.edu.tw
Page: 
79-81
|
DOI: 
https://doi.org/10.14447/jnmes.v18i2.372
Received: 
24 March 2014
| |
Accepted: 
10 May 2015
| | Citation

OPEN ACCESS

Abstract: 

Gd2O3 as pH sensing membrane on Si substrate treated with annealing for the electrolyte-insulator-semiconductor has been fabricated.  The high-k sensing membrane can obtain high sensitivity, high linearity, low hysteresis voltage, and low drift rate.  The high-k Gd2O3 pH sensing membrane show promise for future industrial sensing device applications.

Keywords: 

Gd2O3, annealing, electrolyte-insulator-semiconductor, sensing membrane, pH value

1. Introduction
2. Experimental Methods
3. Results and Discussion
4. Conclusion
  References

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